JPH0441465B2 - - Google Patents

Info

Publication number
JPH0441465B2
JPH0441465B2 JP57232439A JP23243982A JPH0441465B2 JP H0441465 B2 JPH0441465 B2 JP H0441465B2 JP 57232439 A JP57232439 A JP 57232439A JP 23243982 A JP23243982 A JP 23243982A JP H0441465 B2 JPH0441465 B2 JP H0441465B2
Authority
JP
Japan
Prior art keywords
ion
resist
ion beam
exposure
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57232439A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59117122A (ja
Inventor
Toshiro Tsumori
Morikazu Konishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP57232439A priority Critical patent/JPS59117122A/ja
Publication of JPS59117122A publication Critical patent/JPS59117122A/ja
Publication of JPH0441465B2 publication Critical patent/JPH0441465B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57232439A 1982-12-23 1982-12-23 半導体素子製造装置 Granted JPS59117122A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57232439A JPS59117122A (ja) 1982-12-23 1982-12-23 半導体素子製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57232439A JPS59117122A (ja) 1982-12-23 1982-12-23 半導体素子製造装置

Publications (2)

Publication Number Publication Date
JPS59117122A JPS59117122A (ja) 1984-07-06
JPH0441465B2 true JPH0441465B2 (en]) 1992-07-08

Family

ID=16939278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57232439A Granted JPS59117122A (ja) 1982-12-23 1982-12-23 半導体素子製造装置

Country Status (1)

Country Link
JP (1) JPS59117122A (en])

Also Published As

Publication number Publication date
JPS59117122A (ja) 1984-07-06

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